Inventor
JANSEN MAARTEN JOZEF
NL14 patents
⚠️ This page may combine multiple inventors who share the name “JANSEN MAARTEN JOZEF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS11287242B2Mar 29, 2022
Cyclic error measurements and calibration procedures in interferometers
ASML NETHERLANDS BV7 citations84
US10883816B2Jan 5, 2021
Position measurement system, zeroing method, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations71
US11719529B2Aug 8, 2023
Interferometer system, method of determining a mode hop of a laser source of an interferometer system, method of determining a position of a movable object, and lithographic apparatus
ASML NETHERLANDS BV2 citations66
US11556066B2Jan 17, 2023
Stage system and lithographic apparatus
ASML NETHERLANDS BV0 citations61
US12481226B2Nov 25, 2025
Interferometer system, positioning system, a lithographic apparatus, a jitter determination method, and a device manufacturing method
ASML NETHERLANDS BV0 citations60
US11525737B2Dec 13, 2022
Wavelength tracking system, method to calibrate a wavelength tracking system, lithographic apparatus, method to determine an absolute position of a movable object, and interferometer system
ASML NETHERLANDS BV0 citations60
US12270647B2Apr 8, 2025
Method for calibration of an optical measurement system and optical measurement system
ASML NETHERLANDS BV0 citations51
US12305979B2May 20, 2025
Interferometer system and lithographic apparatus
ASML NETHERLANDS BV0 citations50
US12306548B2May 20, 2025
Positioning system, a lithographic apparatus, an absolute position determination method, and a device manufacturing method
ASML NETHERLANDS BV0 citations50
US12270644B2Apr 8, 2025
Compact dual pass interferometer for a plane mirror interferometer
ASML NETHERLANDS BV0 citations50
JANSEN MAARTEN JOZEF
3 patentsUS8937707B2Jan 20, 2015
Lithographic apparatus, device manufacturing method, and method of calibrating a displacement measuring system
JANSEN MAARTEN JOZEF4 citations67
US8547557B2Oct 1, 2013
Apparatus for determining a height map of a surface through both interferometric and non-interferometric measurements
JANSEN MAARTEN JOZEF4 citations59
US8576410B2Nov 5, 2013
Method and apparatus for determining a height of a number of spatial positions on a sample
JANSEN MAARTEN JOZEF2 citations56