Inventor

TANAHASHI KATSUTO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “TANAHASHI KATSUTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUJITSU MICROELECTRONICS LTD

1 patent

US7648887B2Jan 19, 2010

Classification apparatus for semiconductor substrate, classification method of semiconductor substrate, and manufacturing method of semiconductor device

FUJITSU MICROELECTRONICS LTD0 citations44

FUJITSU LTD

1 patent

US7906443B2Mar 15, 2011

Controlling oxygen precipitates in silicon wafers using infrared irradiation and heating

FUJITSU LTD0 citations43