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Inventor
ZEE STEVE
US
2 patents
⚠️ This page may combine multiple inventors who share the name “ZEE STEVE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
QUALCOMM MEMS TECHNOLOGIES INC
1 patent
US7382515B2
Jun 3, 2008
Silicon-rich silicon nitrides as etch stops in MEMS manufacture
QUALCOMM MEMS TECHNOLOGIES INC
25 citations
90
CHUNG WONSUK
1 patent
US8064124B2
Nov 22, 2011
Silicon-rich silicon nitrides as etch stops in MEMS manufacture
CHUNG WONSUK
13 citations
80