Inventor
MCKENNA CHARLES M
US17 patents
⚠️ This page may combine multiple inventors who share the name “MCKENNA CHARLES M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
8 patentsUS4158589AJun 19, 1979
Negative ion extractor for a plasma etching apparatus
IBM72 citations96
US4383177AMay 10, 1983
Multipole implantation-isotope separation ion beam source
IBM41 citations92
US4118630AOct 3, 1978
Ion implantation apparatus with a cooled structure controlling the surface potential of a target surface
IBM31 citations92
US4183780AJan 15, 1980
Photon enhanced reactive ion etching
IBM79 citations91
US4135097AJan 16, 1979
Ion implantation apparatus for controlling the surface potential of a target surface
IBM36 citations90
US4179312ADec 18, 1979
Formation of epitaxial layers doped with conductivity-determining impurities by ion deposition
IBM28 citations81
US4151420AApr 24, 1979
Apparatus for the formation of epitaxial layers doped with conductivity-determining impurities by ion deposition
IBM14 citations72
US4149084AApr 10, 1979
Apparatus for maintaining ion bombardment beam under improved vacuum condition
IBM9 citations67
HUGHES AIRCRAFT CO
6 patentsUS4556798ADec 3, 1985
Focused ion beam column
HUGHES AIRCRAFT CO35 citations92
US4757208AJul 12, 1988
Masked ion beam lithography system and method
HUGHES AIRCRAFT CO43 citations91
US4752692AJun 21, 1988
Liquid metal ion source
HUGHES AIRCRAFT CO29 citations91
US4687940AAug 18, 1987
Hybrid focused-flood ion beam system and method
HUGHES AIRCRAFT CO46 citations91
US4629931ADec 16, 1986
Liquid metal ion source
HUGHES AIRCRAFT CO7 citations74
US4686414AAug 11, 1987
Enhanced wetting of liquid metal alloy ion sources
HUGHES AIRCRAFT CO13 citations69