Inventor
WINNARD JAMES R
US4 patents
Patents
4 patentsUS4179312ADec 18, 1979
Formation of epitaxial layers doped with conductivity-determining impurities by ion deposition
IBM28 citations81
US4556823ADec 3, 1985
Multi-function charged particle apparatus
IBM17 citations72
US4151420AApr 24, 1979
Apparatus for the formation of epitaxial layers doped with conductivity-determining impurities by ion deposition
IBM14 citations72
US4149084AApr 10, 1979
Apparatus for maintaining ion bombardment beam under improved vacuum condition
IBM9 citations67