Inventor
LU FAN-LIN
TW4 patents
⚠️ This page may combine multiple inventors who share the name “LU FAN-LIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
3 patentsUS6848882B2Feb 1, 2005
Apparatus and method for positioning a cassette pod onto a loadport by an overhead hoist transport system
TAIWAN SEMICONDUCTOR MFG41 citations87
US6678581B2Jan 13, 2004
Method of calibrating a wafer edge gripping end effector
TAIWAN SEMICONDUCTOR MFG50 citations87
US6950181B2Sep 27, 2005
Optical wafer presence sensor system
TAIWAN SEMICONDUCTOR MFG8 citations67