Inventor
MARMILLION PATRICIA M
US3 patents
Patents
3 patentsUS6506653B1Jan 14, 2003
Method using disposable and permanent films for diffusion and implant doping
IBM27 citations91
US6924200B2Aug 2, 2005
Methods using disposable and permanent films for diffusion and implantation doping
IBM10 citations72
US5944588AAug 31, 1999
Chemical mechanical polisher
IBM10 citations71