Inventor

JEON JIHEE

BE3 patents

Patents

3 patents

US12211742B2Jan 28, 2025

Methods for depositing gap filling fluid

ASM IP HOLDING BV1 citations59

US12424490B2Sep 23, 2025

Halogenation-based gapfill method and system

ASM IP HOLDING BV0 citations57

US12559837B2Feb 24, 2026

Method for depositing boron nitride

ASM IP HOLDING BV0 citations41