Inventor

SHIOTSUKI TATSUO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “SHIOTSUKI TATSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US5383984AJan 24, 1995

Plasma processing apparatus etching tunnel-type

TOKYO ELECTRON LTD137 citations93

MIGITA TATSUO

1 patent

US8704367B2Apr 22, 2014

Semiconductor device and manufacturing method of semiconductor device

MIGITA TATSUO4 citations66

HOSOKAWA RYUJI

1 patent

US8759971B2Jun 24, 2014

Semiconductor apparatus

HOSOKAWA RYUJI1 citations43