Inventor
YANG JANGGYOO
KR2 patents
Patents
2 patentsUS12444589B2Oct 14, 2025
Operation method of etching apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations52
US12573590B2Mar 10, 2026
Plasma processing apparatus and method of manufacturing semiconductor device by using same
SAMSUNG ELECTRONICS CO LTD0 citations44