Inventor
OKAMURA TAKAFUMI
JP4 patents
Patents
4 patentsUS6764792B1Jul 20, 2004
Halftone phase shift photomask and blanks for halftone phase shift photomask for producing it
DAINIPPON PRINTING CO LTD8 citations71
US6458496B2Oct 1, 2002
Blank for halftone phase shift photomask and halftone phase shift photomask
DAINIPPON PRINTING CO LTD12 citations71
US9924596B2Mar 20, 2018
Structural body and method for manufacturing same
DAINIPPON PRINTING CO LTD0 citations50
US9769927B2Sep 19, 2017
Structural body and method for manufacturing same
DAINIPPON PRINTING CO LTD0 citations50