Inventor
ISHIDA HIDETSUGU
JP3 patents
Patents
3 patentsUS5936726AAug 10, 1999
Inspection method, inspection apparatus and method of production of semiconductor device using them
HITACHI LTD122 citations96
US6198157B1Mar 6, 2001
Semiconductor device having buried boron and carbon regions
HITACHI LTD108 citations94
US6635950B1Oct 21, 2003
Semiconductor device having buried boron and carbon regions, and method of manufacture thereof
HITACHI LTD24 citations89