Inventor

JEONG SEE-JUN

KR2 patents

Patents

2 patents

US11360377B2Jun 14, 2022

Half-tone attenuated phase shift blankmask and photomask for EUV lithography

S&S TECH CO LTD0 citations58

US9482940B2Nov 1, 2016

Blankmask and photomask

S&S TECH CO LTD0 citations48