Inventor

KATER THIJS

NL3 patents

Patents

3 patents

US11977326B2May 7, 2024

Pellicle for EUV lithography

ASML NETHERLANDS BV0 citations56

US11567399B2Jan 31, 2023

EUV pellicles

ASML NETHERLANDS BV0 citations55

US11237475B2Feb 1, 2022

EUV pellicles

ASML NETHERLANDS BV0 citations55