Inventor
OGAWA SHIGEKI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “OGAWA SHIGEKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
3 patentsUS4814829AMar 21, 1989
Projection exposure apparatus
CANON KK162 citations98
US5751404AMay 12, 1998
Exposure apparatus and method wherein alignment is carried out by comparing marks which are incident on both reticle stage and wafer stage reference plates
CANON KK54 citations96
US8922774B2Dec 30, 2014
Method of manufacturing device, and substrate
CANON KK2 citations62