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Inventor
LIN JIIN-HONG
TW
2 patents
Patents
2 patents
US8724088B2
May 13, 2014
Pellicle mounting apparatus and assembly with pellicle mounted on mask
LIN JIIN-HONG
6 citations
75
US8268514B2
Sep 18, 2012
Pellicle mounting method and apparatus
LIN JIIN-HONG
0 citations
43