Inventor

ISAGO MASARU

JP3 patents

Patents

3 patents

US9728418B2Aug 8, 2017

Etching method and etching apparatus

TOKYO ELECTRON LTD0 citations45

US10553409B2Feb 4, 2020

Method of cleaning plasma processing apparatus

TOKYO ELECTRON LTD0 citations41

US11367595B2Jun 21, 2022

Plasma processing apparatus

TOKYO ELECTRON LTD0 citations39