Inventor

HUANG CHUNSHENG

US9 patents

⚠️ This page may combine multiple inventors who share the name “HUANG CHUNSHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

3 patents

US10324045B2Jun 18, 2019

Surface defect inspection with large particle monitoring and laser power control

KLA TENCOR CORP4 citations68

US10732424B2Aug 4, 2020

Inspection-beam shaping on a sample surface at an oblique angle of incidence

KLA TENCOR CORP0 citations52

US9903708B2Feb 27, 2018

Method and apparatus to fold optics in tools for measuring shape and/or thickness of a large and thin substrate

KLA TENCOR CORP0 citations46

NANOMETRICS INC

2 patents

US7433034B1Oct 7, 2008

Darkfield defect inspection with spectral contents

NANOMETRICS INC58 citations96

US7061613B1Jun 13, 2006

Polarizing beam splitter and dual detector calibration of metrology device having a spatial phase modulation

NANOMETRICS INC35 citations92

TROPEL CORP

1 patent

US5416586AMay 16, 1995

Method of testing aspherical optical surfaces with an interferometer

TROPEL CORP75 citations94

ESGW HOLDINGS LTD

1 patent

USD580435SNov 11, 2008

External hard disk drive

ESGW HOLDINGS LTD22 citations85

KLA CORP

1 patent

US10809055B2Oct 20, 2020

Apparatus and method for measuring topography and gradient of the surfaces, shape, and thickness of patterned and unpatterned wafers

KLA CORP5 citations71

WANG CHUNHAI

1 patent

US9279663B2Mar 8, 2016

Method and apparatus to fold optics in tools for measuring shape and/or thickness of a large and thin substrate

WANG CHUNHAI0 citations44