Inventor

TOM ALEX J

US3 patents

Patents

3 patents

US12265377B2Apr 1, 2025

Autonomous substrate processing system

APPLIED MATERIALS INC3 citations71

US11709477B2Jul 25, 2023

Autonomous substrate processing system

APPLIED MATERIALS INC3 citations69

US12031885B2Jul 9, 2024

Leak detection for gas sticks

APPLIED MATERIALS INC1 citations58