Inventor

BEEN AUKE JURIAAN

NL2 patents

Patents

2 patents

US10509331B2Dec 17, 2019

Lithography apparatus and a method of manufacturing a device

ASML NETHERLANDS BV2 citations66

US10845716B2Nov 24, 2020

Lithography apparatus and a method of manufacturing a device

ASML NETHERLANDS BV0 citations45