Inventor
KEHR MIRKO
DE3 patents
Patents
3 patentsUS10964568B2Mar 30, 2021
Substrate carrier
MEYER BURGER GERMANY GMBH0 citations40
US12009186B2Jun 11, 2024
Device for transporting substrate, treatment device with receiving plate adapted to substrate carrier of a device of this kind, and method for processing a substrate using a device of this kind for the transport of a substrate, and treatment facility
MEYER BURGER GERMANY GMBH0 citations38
US10199250B2Feb 5, 2019
Substrate processing device
MEYER BURGER GERMANY GMBH0 citations32