Inventor
IE Sangyub
KR4 patents
Patents
4 patentsUS11352698B2Jun 7, 2022
Atomic layer deposition apparatus and methods of fabricating semiconductor devices using the same
SAMSUNG ELECTRONICS CO LTD0 citations56
US12503765B2Dec 23, 2025
Batch type substrate processing apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations47
US12312690B2May 27, 2025
Semiconductor processing apparatus and semiconductor processing method using the same
SAMSUNG ELECTRONICS CO LTD0 citations46
US10079186B2Sep 18, 2018
Semiconductor device and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD0 citations34