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Inventor
KENT MARTIN A
US
2 patents
⚠️ This page may combine multiple inventors who share the name “KENT MARTIN A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GEN SIGNAL CORP
1 patent
US5248371A
Sep 28, 1993
Hollow-anode glow discharge apparatus
GEN SIGNAL CORP
255 citations
95
TOKYO ELECTRON LTD
1 patent
US6779481B2
Aug 24, 2004
Electrical coupling between chamber parts in electronic device processing equipment
TOKYO ELECTRON LTD
50 citations
88