Inventor
TOURE ABRON
US3 patents
Patents
3 patentsUS6159862ADec 12, 2000
Semiconductor processing method and system using C5 F8
TOKYO ELECTRON LTD86 citations94
US6465359B2Oct 15, 2002
Etchant for use in a semiconductor processing method and system
TOKYO ELECTRON LTD22 citations91
US6779481B2Aug 24, 2004
Electrical coupling between chamber parts in electronic device processing equipment
TOKYO ELECTRON LTD50 citations88