Inventor
SIECK PETER A
US9 patents
⚠️ This page may combine multiple inventors who share the name “SIECK PETER A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BOC GROUP INC
7 patentsUS5645699AJul 8, 1997
Dual cylindrical target magnetron with multiple anodes
BOC GROUP INC102 citations96
US5464518ANov 7, 1995
Cylindrical magnetron shield structure
BOC GROUP INC63 citations95
US5683558ANov 4, 1997
Anode structure for magnetron sputtering systems
BOC GROUP INC52 citations94
US5616225AApr 1, 1997
Use of multiple anodes in a magnetron for improving the uniformity of its plasma
BOC GROUP INC73 citations94
US5407551AApr 18, 1995
Planar magnetron sputtering apparatus
BOC GROUP INC56 citations93
US5527439AJun 18, 1996
Cylindrical magnetron shield structure
BOC GROUP INC64 citations91
US5487821AJan 30, 1996
Anode structure for magnetron sputtering systems
BOC GROUP INC27 citations90