Inventor

O'MOORE FERGAL

US3 patents

⚠️ This page may combine multiple inventors who share the name “O'MOORE FERGAL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

2 patents

US7632170B2Dec 15, 2009

CMP apparatuses with polishing assemblies that provide for the passive removal of slurry

NOVELLUS SYSTEMS INC9 citations80

US7544115B2Jun 9, 2009

Chemical mechanical polishing assembly with altered polishing pad topographical components

NOVELLUS SYSTEMS INC7 citations68

O'MOORE FERGAL

1 patent

US8128461B1Mar 6, 2012

Chemical mechanical polishing with multi-zone slurry delivery

O'MOORE FERGAL12 citations75