Inventor

ENGLER CHRISTINA L

US3 patents

Patents

3 patents

US11270911B2Mar 8, 2022

Doping of metal barrier layers

APPLIED MATERIALS INC2 citations71

US12195845B2Jan 14, 2025

Conditioning treatment for ALD productivity

APPLIED MATERIALS INC0 citations58

US11566324B2Jan 31, 2023

Conditioning treatment for ALD productivity

APPLIED MATERIALS INC0 citations58