Inventor

OIKARI JAMES R

US3 patents

Patents

3 patents

US5861064AJan 19, 1999

Process for enhanced photoresist removal in conjunction with various methods and chemistries

FSI INT INC40 citations90

US7364625B2Apr 29, 2008

Rinsing processes and equipment

FSI INT INC31 citations88

US6037271AMar 14, 2000

Low haze wafer treatment process

FSI INT INC11 citations67