Inventor

CHOU CHENG-HSUAN

US4 patents

Patents

4 patents

US10755900B2Aug 25, 2020

Multi-layer plasma erosion protection for chamber components

APPLIED MATERIALS INC7 citations83

US12351910B2Jul 8, 2025

Hafnium aluminum oxide coatings deposited by atomic layer deposition

APPLIED MATERIALS INC0 citations60

US11933942B2Mar 19, 2024

Non-line-of-sight deposition of coating on internal components of assembled device

APPLIED MATERIALS INC1 citations60

US11401599B2Aug 2, 2022

Erosion resistant metal silicate coatings

APPLIED MATERIALS INC0 citations49