Inventor
KOSHIHARA SHUNSUKE
JP11 patents
⚠️ This page may combine multiple inventors who share the name “KOSHIHARA SHUNSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
3 patentsHITACHI SCIENCE SYSTEMS LTD
3 patentsHITACHI HIGH TECH CORP
2 patentsUS10732512B2Aug 4, 2020
Image processor, method for generating pattern using self-organizing lithographic techniques and computer program
HITACHI HIGH TECH CORP0 citations51
US7834316B2Nov 16, 2010
Method for adjusting imaging magnification and charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations47