Inventor
GOVZMAN BORIS
US7 patents
⚠️ This page may combine multiple inventors who share the name “GOVZMAN BORIS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS5957751ASep 28, 1999
Carrier head with a substrate detection mechanism for a chemical mechanical polishing system
APPLIED MATERIALS INC147 citations98
US6454332B1Sep 24, 2002
Apparatus and methods for handling a substrate
APPLIED MATERIALS INC51 citations92
US6244932B1Jun 12, 2001
Method for detecting the presence of a substrate in a carrier head
APPLIED MATERIALS INC20 citations92
US7513062B2Apr 7, 2009
Single wafer dryer and drying methods
APPLIED MATERIALS INC23 citations91
US6517415B2Feb 11, 2003
Carrier head with a substrate detection mechanism for a chemical mechanical polishing system
APPLIED MATERIALS INC10 citations82