Inventor
CHEN HUNG
US29 patents
⚠️ This page may combine multiple inventors who share the name “CHEN HUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
26 patentsUS6183354B1Feb 6, 2001
Carrier head with a flexible membrane for a chemical mechanical polishing system
APPLIED MATERIALS INC276 citations99
US6159079ADec 12, 2000
Carrier head for chemical mechanical polishing a substrate
APPLIED MATERIALS INC152 citations99
US6132298AOct 17, 2000
Carrier head with edge control for chemical mechanical polishing
APPLIED MATERIALS INC118 citations99
US6080050AJun 27, 2000
Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus
APPLIED MATERIALS INC125 citations99
US6277014B1Aug 21, 2001
Carrier head with a flexible membrane for chemical mechanical polishing
APPLIED MATERIALS INC93 citations98
US6162116ADec 19, 2000
Carrier head for chemical mechanical polishing
APPLIED MATERIALS INC91 citations98
US5993302ANov 30, 1999
Carrier head with a removable retaining ring for a chemical mechanical polishing apparatus
APPLIED MATERIALS INC120 citations98
US5957751ASep 28, 1999
Carrier head with a substrate detection mechanism for a chemical mechanical polishing system
APPLIED MATERIALS INC147 citations98
US6217426B1Apr 17, 2001
CMP polishing pad
APPLIED MATERIALS INC83 citations97
US6575825B2Jun 10, 2003
CMP polishing pad
APPLIED MATERIALS INC49 citations96
US6361420B1Mar 26, 2002
Method of chemical mechanical polishing with edge control
APPLIED MATERIALS INC55 citations96
US6165058ADec 26, 2000
Carrier head for chemical mechanical polishing
APPLIED MATERIALS INC46 citations96
US7040971B2May 9, 2006
Carrier head with a flexible membrane
APPLIED MATERIALS INC13 citations93
US6857946B2Feb 22, 2005
Carrier head with a flexure
APPLIED MATERIALS INC12 citations93
US6540594B2Apr 1, 2003
Carrier head with a flexible membrane for a chemical mechanical polishing system
APPLIED MATERIALS INC16 citations93
US6386955B2May 14, 2002
Carrier head with a flexible membrane for a chemical mechanical polishing system
APPLIED MATERIALS INC23 citations93
US6277009B1Aug 21, 2001
Carrier head including a flexible membrane and a compliant backing member for a chemical mechanical polishing apparatus
APPLIED MATERIALS INC33 citations93
US6705932B1Mar 16, 2004
Carrier head for chemical mechanical polishing
APPLIED MATERIALS INC31 citations92
US6514124B1Feb 4, 2003
Carrier head for chemical mechanical polishing a substrate
APPLIED MATERIALS INC24 citations92
US6406361B1Jun 18, 2002
Carrier head for chemical mechanical polishing
APPLIED MATERIALS INC34 citations92
US6244932B1Jun 12, 2001
Method for detecting the presence of a substrate in a carrier head
APPLIED MATERIALS INC20 citations92
US10500694B2Dec 10, 2019
Chemical mechanical polishing apparatus and methods
APPLIED MATERIALS INC7 citations84
US6517415B2Feb 11, 2003
Carrier head with a substrate detection mechanism for a chemical mechanical polishing system
APPLIED MATERIALS INC10 citations82
US9486893B2Nov 8, 2016
Conditioning of grooving in polishing pads
APPLIED MATERIALS INC6 citations73
US9308623B2Apr 12, 2016
Multi-disk chemical mechanical polishing pad conditioners and methods
APPLIED MATERIALS INC3 citations70
US11453097B2Sep 27, 2022
Chemical mechanical polishing apparatus and methods
APPLIED MATERIALS INC0 citations62