Inventor
DUNNE JUDE A
US3 patents
Patents
3 patentsUS6583047B2Jun 24, 2003
Method for eliminating reaction between photoresist and OSG
HONEYWELL INT INC67 citations94
US6818552B2Nov 16, 2004
Method for eliminating reaction between photoresist and OSG
HONEYWELL INT INC17 citations90
US6379870B1Apr 30, 2002
Method for determining side wall oxidation of low-k materials
HONEYWELL INT INC6 citations57