Inventor

YAO SHAOKANG

CN2 patents

Patents

2 patents

US12349343B2Jul 1, 2025

Method for making active area air gap

SHANGHAI HUALI MICROELECT CORP0 citations46

US11043504B2Jun 22, 2021

Method for fabricating word lines of NAND memory and NAND memory comprising word lines fabricated by adopting the same

SHANGHAI HUALI MICROELECT CORP0 citations37