Inventor
HOSODA SHOZO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “HOSODA SHOZO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS6110287AAug 29, 2000
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD397 citations97
US5779803AJul 14, 1998
Plasma processing apparatus
TOKYO ELECTRON LTD83 citations94
US5611655AMar 18, 1997
Vacuum process apparatus and vacuum processing method
TOKYO ELECTRON LTD143 citations94
US5578164ANov 26, 1996
Plasma processing apparatus and method
TOKYO ELECTRON LTD30 citations91