Inventor
LEE HAE-JEONG
KR7 patents
Patents
7 patentsUS6057251AMay 2, 2000
Method for forming interlevel dielectric layer in semiconductor device using electron beams
SAMSUNG ELECTRONICS CO LTD67 citations95
US5989983ANov 23, 1999
Method of fabricating and curing spin-on-glass layers by electron beam irradiation
SAMSUNG ELECTRONICS CO LTD64 citations95
US6117785ASep 12, 2000
Multiple etch methods for forming contact holes in microelectronic devices including SOG layers and capping layers thereon
SAMSUNG ELECTRONICS CO LTD21 citations92
US7052967B2May 30, 2006
Method for fabricating capacitor array preventing crosstalk between adjacent capacitors in semiconductor device
SAMSUNG ELECTRONICS CO LTD33 citations91
US6563190B1May 13, 2003
Capacitor array preventing crosstalk between adjacent capacitors in semiconductor device
SAMSUNG ELECTRONICS CO LTD15 citations91
US6429445B1Aug 6, 2002
Electron beam irradiating apparatus having cathode plate formed of non-metal conductive material
SAMSUNG ELECTRONICS CO LTD8 citations73
US5866476AFeb 2, 1999
Methods for forming moisture blocking layers
SAMSUNG ELECTRONICS CO LTD16 citations69