Inventor

DANA STEPHANE

IL2 patents

⚠️ This page may combine multiple inventors who share the name “DANA STEPHANE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

1 patent

US6392229B1May 21, 2002

AFM-based lithography metrology tool

APPLIED MATERIALS INC64 citations92

DANA STEPHANE

1 patent

US8513625B2Aug 20, 2013

Track-based metrology method and apparatus

DANA STEPHANE5 citations64