Inventor
MIZUTANI SHINJI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “MIZUTANI SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
12 patentsUS5805866ASep 8, 1998
Alignment method
NIKON CORP76 citations96
US5601957AFeb 11, 1997
Micro devices manufacturing method comprising the use of a second pattern overlying an alignment mark to reduce flattening
NIKON CORP43 citations96
US6163366ADec 19, 2000
Exposure method and apparatus
NIKON CORP53 citations95
US5532091AJul 2, 1996
Aligning method
NIKON CORP86 citations95
US6184972B1Feb 6, 2001
Substrate transport apparatus, substrate holding apparatus and substrate processing apparatus
NIKON CORP111 citations92
US5907405AMay 25, 1999
Alignment method and exposure system
NIKON CORP40 citations92
US5721605AFeb 24, 1998
Alignment device and method with focus detection system
NIKON CORP35 citations92
US6888621B2May 3, 2005
Mask-holding apparatus for a light exposure apparatus and related scanning-exposure method
NIKON CORP32 citations91
US6641962B2Nov 4, 2003
Micro devices manufacturing method utilizing concave and convex alignment mark patterns
NIKON CORP5 citations74
US6566022B2May 20, 2003
Micro devices manufacturing method and apparatus therefor
NIKON CORP7 citations74
US6016186AJan 18, 2000
Alignment device and method with focus detection system
NIKON CORP8 citations73
US6306548B1Oct 23, 2001
Micro devices manufacturing method and apparatus therefor
NIKON CORP1 citations63