Inventor
YASUDA MASAHIKO
JP36 patents
⚠️ This page may combine multiple inventors who share the name “YASUDA MASAHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
18 patentsUS6876946B2Apr 5, 2005
Alignment method and apparatus therefor
NIKON CORP80 citations98
US6278957B1Aug 21, 2001
Alignment method and apparatus therefor
NIKON CORP116 citations98
US6549271B2Apr 15, 2003
Exposure apparatus and method
NIKON CORP58 citations96
US5601957AFeb 11, 1997
Micro devices manufacturing method comprising the use of a second pattern overlying an alignment mark to reduce flattening
NIKON CORP43 citations96
US5795687AAug 18, 1998
Projection exposure method and alignment
NIKON CORP35 citations92
US6888621B2May 3, 2005
Mask-holding apparatus for a light exposure apparatus and related scanning-exposure method
NIKON CORP32 citations91
US6110021AAug 29, 2000
Micro devices manufacturing method and apparatus therefor
NIKON CORP12 citations82
US6641962B2Nov 4, 2003
Micro devices manufacturing method utilizing concave and convex alignment mark patterns
NIKON CORP5 citations74
US6566022B2May 20, 2003
Micro devices manufacturing method and apparatus therefor
NIKON CORP7 citations74
US10222708B2Mar 5, 2019
Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
NIKON CORP1 citations72
US10209623B2Feb 19, 2019
Exposure apparatus, exposure method, and method for producing device
NIKON CORP1 citations71
US6306548B1Oct 23, 2001
Micro devices manufacturing method and apparatus therefor
NIKON CORP1 citations63
US9348238B2May 24, 2016
Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
NIKON CORP1 citations62
US9298108B2Mar 29, 2016
Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
NIKON CORP2 citations62
US9383656B2Jul 5, 2016
Exposure apparatus, exposure method, and method for producing device
NIKON CORP1 citations61
US9223230B2Dec 29, 2015
Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
NIKON CORP0 citations51
US9223231B2Dec 29, 2015
Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
NIKON CORP0 citations51
US8054465B2Nov 8, 2011
Position measurement method
NIKON CORP0 citations51
YASUDA MASAHIKO
5 patentsUS8072578B2Dec 6, 2011
Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
YASUDA MASAHIKO551 citations98
US8059260B2Nov 15, 2011
Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
YASUDA MASAHIKO8 citations91
US8576379B2Nov 5, 2013
Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
YASUDA MASAHIKO4 citations72
US8130361B2Mar 6, 2012
Exposure apparatus, exposure method, and method for producing device
YASUDA MASAHIKO4 citations72
US9063438B2Jun 23, 2015
Exposure apparatus, exposure method, and method for producing device
YASUDA MASAHIKO1 citations60
KYOWA HAKKO KOGYO KK
4 patentsUS5292853AMar 8, 1994
Polyurethane resin containing a phosphoric acid group
KYOWA HAKKO KOGYO KK10 citations72
US5037934AAug 6, 1991
Magnetic coating formulations and magnetic recording media
KYOWA HAKKO KOGYO KK9 citations72
US5142001AAug 25, 1992
Polyurethane composition
KYOWA HAKKO KOGYO KK11 citations71
US5330669AJul 19, 1994
Magnetic coating formulations
KYOWA HAKKO KOGYO KK5 citations61
GOODRICH CO B F
3 patentsUS5162162ANov 10, 1992
Magnetic coating formulations and magnetic recording media
GOODRICH CO B F8 citations72
US5158830AOct 27, 1992
Magnetic recording medium comprising a polyurethane resin coating residual groups derived from specified phosphorous containing compounds
GOODRICH CO B F8 citations72
US5273826ADec 28, 1993
Magnetic coating formulations and magnetic recording media
GOODRICH CO B F5 citations61