Inventor
CHENG WING L
US8 patents
⚠️ This page may combine multiple inventors who share the name “CHENG WING L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS6503368B1Jan 7, 2003
Substrate support having bonded sections and method
APPLIED MATERIALS INC76 citations98
US6310755B1Oct 30, 2001
Electrostatic chuck having gas cavity and method
APPLIED MATERIALS INC325 citations98
US6538872B1Mar 25, 2003
Electrostatic chuck having heater and method
APPLIED MATERIALS INC123 citations97
US6490146B2Dec 3, 2002
Electrostatic chuck bonded to base with a bond layer and method
APPLIED MATERIALS INC88 citations97
US6583980B1Jun 24, 2003
Substrate support tolerant to thermal expansion stresses
APPLIED MATERIALS INC60 citations96
US6462928B1Oct 8, 2002
Electrostatic chuck having improved electrical connector and method
APPLIED MATERIALS INC65 citations96