Inventor
LUIJKX CORNELIS PETRUS ANDREAS
NL2 patents
Patents
2 patentsUS7307263B2Dec 11, 2007
Lithographic apparatus, radiation system, contaminant trap, device manufacturing method, and method for trapping contaminants in a contaminant trap
ASML NETHERLANDS BV50 citations91
US7030958B2Apr 18, 2006
Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method
ASML NETHERLANDS BV31 citations88