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Inventor

WANG SHUMIN

US55 patents
⚠️ This page may combine multiple inventors who share the name “WANG SHUMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CABOT MICROELECTRONICS CORP

33 patents
US6217416B1Apr 17, 2001

Chemical mechanical polishing slurry useful for copper/tantalum substrates

CABOT MICROELECTRONICS CORP202 citations99
US6126853AOct 3, 2000

Chemical mechanical polishing slurry useful for copper substrates

CABOT MICROELECTRONICS CORP116 citations99
US6582623B1Jun 24, 2003

CMP composition containing silane modified abrasive particles

CABOT MICROELECTRONICS CORP143 citations98
US6177026B1Jan 23, 2001

CMP slurry containing a solid catalyst

CABOT MICROELECTRONICS CORP111 citations98
US6646348B1Nov 11, 2003

Silane containing polishing composition for CMP

CABOT MICROELECTRONICS CORP48 citations96
US6435947B2Aug 20, 2002

CMP polishing pad including a solid catalyst

CABOT MICROELECTRONICS CORP55 citations96
US6432828B2Aug 13, 2002

Chemical mechanical polishing slurry useful for copper substrates

CABOT MICROELECTRONICS CORP58 citations96
US6395693B1May 28, 2002

Cleaning solution for semiconductor surfaces following chemical-mechanical polishing

CABOT MICROELECTRONICS CORP43 citations96
US6689692B1Feb 10, 2004

Composition for oxide CMP

CABOT MICROELECTRONICS CORP56 citations95
US6447371B2Sep 10, 2002

Chemical mechanical polishing slurry useful for copper/tantalum substrates

CABOT MICROELECTRONICS CORP58 citations94
US6840971B2Jan 11, 2005

Chemical mechanical polishing systems and methods for their use

CABOT MICROELECTRONICS CORP30 citations93
US6541434B2Apr 1, 2003

Cleaning solution for semiconductor surfaces following chemical-mechanical polishing

CABOT MICROELECTRONICS CORP26 citations93
US6362104B1Mar 26, 2002

Method for polishing a substrate using a CMP slurry

CABOT MICROELECTRONICS CORP42 citations93
US6316366B1Nov 13, 2001

Method of polishing using multi-oxidizer slurry

CABOT MICROELECTRONICS CORP36 citations93
US6984588B2Jan 10, 2006

Compositions for oxide CMP

CABOT MICROELECTRONICS CORP21 citations92
US6976905B1Dec 20, 2005

Method for polishing a memory or rigid disk with a phosphate ion-containing polishing system

CABOT MICROELECTRONICS CORP34 citations92
US6867140B2Mar 15, 2005

Method of polishing a multi-layer substrate

CABOT MICROELECTRONICS CORP20 citations92
US6855266B1Feb 15, 2005

Polishing system with stopping compound and method of its use

CABOT MICROELECTRONICS CORP26 citations92
US6852632B2Feb 8, 2005

Method of polishing a multi-layer substrate

CABOT MICROELECTRONICS CORP33 citations92
US6592776B1Jul 15, 2003

Polishing composition for metal CMP

CABOT MICROELECTRONICS CORP30 citations92
US6569350B2May 27, 2003

Chemical mechanical polishing slurry useful for copper substrates

CABOT MICROELECTRONICS CORP23 citations92
US6471884B1Oct 29, 2002

Method for polishing a memory or rigid disk with an amino acid-containing composition

CABOT MICROELECTRONICS CORP22 citations92
US6468137B1Oct 22, 2002

Method for polishing a memory or rigid disk with an oxidized halide-containing polishing system

CABOT MICROELECTRONICS CORP21 citations92
US6362106B1Mar 26, 2002

Chemical mechanical polishing method useful for copper substrates

CABOT MICROELECTRONICS CORP25 citations92
US6316365B1Nov 13, 2001

Chemical-mechanical polishing method

CABOT MICROELECTRONICS CORP32 citations92
US6309560B1Oct 30, 2001

Chemical mechanical polishing slurry useful for copper substrates

CABOT MICROELECTRONICS CORP41 citations92
US6811474B2Nov 2, 2004

Polishing composition containing conducting polymer

CABOT MICROELECTRONICS CORP20 citations91
US7044836B2May 16, 2006

Coated metal oxide particles for CMP

CABOT MICROELECTRONICS CORP51 citations88
US7381648B2Jun 3, 2008

Chemical mechanical polishing slurry useful for copper substrates

CABOT MICROELECTRONICS CORP7 citations74
US6793559B2Sep 21, 2004

Composition and method for polishing rigid disks

CABOT MICROELECTRONICS CORP8 citations74
US6347978B1Feb 19, 2002

Composition and method for polishing rigid disks

CABOT MICROELECTRONICS CORP10 citations74
US6767476B2Jul 27, 2004

Polishing composition for metal CMP

CABOT MICROELECTRONICS CORP9 citations73
US7021993B2Apr 4, 2006

Method of polishing a substrate with a polishing system containing conducting polymer

CABOT MICROELECTRONICS CORP5 citations61

CABOT CORP

4 patents

WANG SHUMIN

3 patents

BYD CO LTD

2 patents

UNIV CHINA AGRICULTURAL

2 patents

UNIV AUBURN

1 patent

KORETSKY ALAN P

1 patent

GE MED SYS GLOBAL TECH CO LLC

1 patent

AURORA CANNABIS ENTPR INC

1 patent

UNIV PEKING THIRD HOSPITAL

1 patent

ANJI MICROELECTRONICS SHANGHAI

1 patent

Showing the top 50 of 55 patents by PatentIndex Score.