Inventor
WANG SHUMIN
US55 patents
⚠️ This page may combine multiple inventors who share the name “WANG SHUMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT MICROELECTRONICS CORP
33 patentsUS6217416B1Apr 17, 2001
Chemical mechanical polishing slurry useful for copper/tantalum substrates
CABOT MICROELECTRONICS CORP202 citations99
US6126853AOct 3, 2000
Chemical mechanical polishing slurry useful for copper substrates
CABOT MICROELECTRONICS CORP116 citations99
US6582623B1Jun 24, 2003
CMP composition containing silane modified abrasive particles
CABOT MICROELECTRONICS CORP143 citations98
US6177026B1Jan 23, 2001
CMP slurry containing a solid catalyst
CABOT MICROELECTRONICS CORP111 citations98
US6646348B1Nov 11, 2003
Silane containing polishing composition for CMP
CABOT MICROELECTRONICS CORP48 citations96
US6435947B2Aug 20, 2002
CMP polishing pad including a solid catalyst
CABOT MICROELECTRONICS CORP55 citations96
US6432828B2Aug 13, 2002
Chemical mechanical polishing slurry useful for copper substrates
CABOT MICROELECTRONICS CORP58 citations96
US6395693B1May 28, 2002
Cleaning solution for semiconductor surfaces following chemical-mechanical polishing
CABOT MICROELECTRONICS CORP43 citations96
US6689692B1Feb 10, 2004
Composition for oxide CMP
CABOT MICROELECTRONICS CORP56 citations95
US6447371B2Sep 10, 2002
Chemical mechanical polishing slurry useful for copper/tantalum substrates
CABOT MICROELECTRONICS CORP58 citations94
US6840971B2Jan 11, 2005
Chemical mechanical polishing systems and methods for their use
CABOT MICROELECTRONICS CORP30 citations93
US6541434B2Apr 1, 2003
Cleaning solution for semiconductor surfaces following chemical-mechanical polishing
CABOT MICROELECTRONICS CORP26 citations93
US6362104B1Mar 26, 2002
Method for polishing a substrate using a CMP slurry
CABOT MICROELECTRONICS CORP42 citations93
US6316366B1Nov 13, 2001
Method of polishing using multi-oxidizer slurry
CABOT MICROELECTRONICS CORP36 citations93
US6984588B2Jan 10, 2006
Compositions for oxide CMP
CABOT MICROELECTRONICS CORP21 citations92
US6976905B1Dec 20, 2005
Method for polishing a memory or rigid disk with a phosphate ion-containing polishing system
CABOT MICROELECTRONICS CORP34 citations92
US6867140B2Mar 15, 2005
Method of polishing a multi-layer substrate
CABOT MICROELECTRONICS CORP20 citations92
US6855266B1Feb 15, 2005
Polishing system with stopping compound and method of its use
CABOT MICROELECTRONICS CORP26 citations92
US6852632B2Feb 8, 2005
Method of polishing a multi-layer substrate
CABOT MICROELECTRONICS CORP33 citations92
US6592776B1Jul 15, 2003
Polishing composition for metal CMP
CABOT MICROELECTRONICS CORP30 citations92
US6569350B2May 27, 2003
Chemical mechanical polishing slurry useful for copper substrates
CABOT MICROELECTRONICS CORP23 citations92
US6471884B1Oct 29, 2002
Method for polishing a memory or rigid disk with an amino acid-containing composition
CABOT MICROELECTRONICS CORP22 citations92
US6468137B1Oct 22, 2002
Method for polishing a memory or rigid disk with an oxidized halide-containing polishing system
CABOT MICROELECTRONICS CORP21 citations92
US6362106B1Mar 26, 2002
Chemical mechanical polishing method useful for copper substrates
CABOT MICROELECTRONICS CORP25 citations92
US6316365B1Nov 13, 2001
Chemical-mechanical polishing method
CABOT MICROELECTRONICS CORP32 citations92
US6309560B1Oct 30, 2001
Chemical mechanical polishing slurry useful for copper substrates
CABOT MICROELECTRONICS CORP41 citations92
US6811474B2Nov 2, 2004
Polishing composition containing conducting polymer
CABOT MICROELECTRONICS CORP20 citations91
US7044836B2May 16, 2006
Coated metal oxide particles for CMP
CABOT MICROELECTRONICS CORP51 citations88
US7381648B2Jun 3, 2008
Chemical mechanical polishing slurry useful for copper substrates
CABOT MICROELECTRONICS CORP7 citations74
US6793559B2Sep 21, 2004
Composition and method for polishing rigid disks
CABOT MICROELECTRONICS CORP8 citations74
US6347978B1Feb 19, 2002
Composition and method for polishing rigid disks
CABOT MICROELECTRONICS CORP10 citations74
US6767476B2Jul 27, 2004
Polishing composition for metal CMP
CABOT MICROELECTRONICS CORP9 citations73
US7021993B2Apr 4, 2006
Method of polishing a substrate with a polishing system containing conducting polymer
CABOT MICROELECTRONICS CORP5 citations61
CABOT CORP
4 patentsUS6063306AMay 16, 2000
Chemical mechanical polishing slurry useful for copper/tantalum substrate
CABOT CORP372 citations99
US5783489AJul 21, 1998
Multi-oxidizer slurry for chemical mechanical polishing
CABOT CORP263 citations99
US6039891AMar 21, 2000
Multi-oxidizer precursor for chemical mechanical polishing
CABOT CORP57 citations96
US6033596AMar 7, 2000
Multi-oxidizer slurry for chemical mechanical polishing
CABOT CORP52 citations96
WANG SHUMIN
3 patentsUS9890472B2Feb 13, 2018
Monolithic integrated lattice mismatched crystal template and preparation method thereof
WANG SHUMIN2 citations71
US7354530B2Apr 8, 2008
Chemical mechanical polishing systems and methods for their use
WANG SHUMIN3 citations61
US9850571B2Dec 26, 2017
Method for preparing graphene
WANG SHUMIN0 citations47
BYD CO LTD
2 patentsUNIV CHINA AGRICULTURAL
2 patentsUNIV AUBURN
1 patentKORETSKY ALAN P
1 patentGE MED SYS GLOBAL TECH CO LLC
1 patentAURORA CANNABIS ENTPR INC
1 patentUNIV PEKING THIRD HOSPITAL
1 patentANJI MICROELECTRONICS SHANGHAI
1 patentShowing the top 50 of 55 patents by PatentIndex Score.