Inventor
FREED MASON L
US12 patents
⚠️ This page may combine multiple inventors who share the name “FREED MASON L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ONWAFER TECHNOLOGIES INC
5 patentsUS6691068B1Feb 10, 2004
Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control
ONWAFER TECHNOLOGIES INC148 citations98
US7282889B2Oct 16, 2007
Maintenance unit for a sensor apparatus
ONWAFER TECHNOLOGIES INC24 citations92
US6789034B2Sep 7, 2004
Data collection methods and apparatus with parasitic correction
ONWAFER TECHNOLOGIES INC26 citations91
US6671660B2Dec 30, 2003
Methods and apparatus for power control
ONWAFER TECHNOLOGIES INC51 citations91
US7299148B2Nov 20, 2007
Methods and apparatus for low distortion parameter measurements
ONWAFER TECHNOLOGIES INC20 citations90
KLA TENCOR CORP
5 patentsUS7531984B2May 12, 2009
Sensor apparatus power transfer, communication and maintenance methods and apparatus
KLA TENCOR CORP15 citations83
US7960670B2Jun 14, 2011
Methods of and apparatuses for measuring electrical parameters of a plasma process
KLA TENCOR CORP13 citations82
US7482576B2Jan 27, 2009
Apparatuses for and methods of monitoring optical radiation parameters for substrate processing operations
KLA TENCOR CORP8 citations81
US7580767B2Aug 25, 2009
Methods of and apparatuses for maintenance, diagnosis, and optimization of processes
KLA TENCOR CORP12 citations79
US9029728B2May 12, 2015
Methods of and apparatuses for measuring electrical parameters of a plasma process
KLA TENCOR CORP0 citations50