Inventor
SPANOS COSTAS J
US13 patents
⚠️ This page may combine multiple inventors who share the name “SPANOS COSTAS J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ONWAFER TECHNOLOGIES INC
6 patentsUS6691068B1Feb 10, 2004
Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control
ONWAFER TECHNOLOGIES INC148 citations98
US6738722B2May 18, 2004
Data collection and correction methods and apparatus
ONWAFER TECHNOLOGIES INC54 citations94
US7282889B2Oct 16, 2007
Maintenance unit for a sensor apparatus
ONWAFER TECHNOLOGIES INC24 citations92
US7016754B2Mar 21, 2006
Methods of and apparatus for controlling process profiles
ONWAFER TECHNOLOGIES INC44 citations91
US7299148B2Nov 20, 2007
Methods and apparatus for low distortion parameter measurements
ONWAFER TECHNOLOGIES INC20 citations90
US6741945B2May 25, 2004
Sensor geometry correction methods and apparatus
ONWAFER TECHNOLOGIES INC25 citations86
KLA TENCOR CORP
4 patentsUS7531984B2May 12, 2009
Sensor apparatus power transfer, communication and maintenance methods and apparatus
KLA TENCOR CORP15 citations83
US7960670B2Jun 14, 2011
Methods of and apparatuses for measuring electrical parameters of a plasma process
KLA TENCOR CORP13 citations82
US7580767B2Aug 25, 2009
Methods of and apparatuses for maintenance, diagnosis, and optimization of processes
KLA TENCOR CORP12 citations79
US9029728B2May 12, 2015
Methods of and apparatuses for measuring electrical parameters of a plasma process
KLA TENCOR CORP0 citations50