Inventor

HSU CHUNGWEI

TW4 patents

⚠️ This page may combine multiple inventors who share the name “HSU CHUNGWEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NANYA TECHNOLOGY CORP

2 patents

US6083807AJul 4, 2000

Overlay measuring mark and its method

NANYA TECHNOLOGY CORP40 citations87

US6215546B1Apr 10, 2001

Method of optical correction for improving the pattern shrinkage caused by scattering of the light

NANYA TECHNOLOGY CORP4 citations55

ASML MASKTOOLS BV

2 patents

US7211815B2May 1, 2007

Method of achieving CD linearity control for full-chip CPL manufacturing

ASML MASKTOOLS BV2 citations58

US7667216B2Feb 23, 2010

Method of achieving CD linearity control for full-chip CPL manufacturing

ASML MASKTOOLS BV1 citations49