Inventor
YOO JAE MYUNG
US5 patents
⚠️ This page may combine multiple inventors who share the name “YOO JAE MYUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS12061422B2Aug 13, 2024
Method for fast loading substrates in a flat panel tool
APPLIED MATERIALS INC0 citations56
US11009801B2May 18, 2021
Dynamic cooling control for thermal stabilization for lithography system
APPLIED MATERIALS INC0 citations56
US10901328B2Jan 26, 2021
Method for fast loading substrates in a flat panel tool
APPLIED MATERIALS INC0 citations56
US10788762B2Sep 29, 2020
Dynamic cooling control for thermal stabilization for lithography system
APPLIED MATERIALS INC1 citations56