P

Inventor

SEKIMOTO MASAHIKO

JP39 patents
⚠️ This page may combine multiple inventors who share the name “SEKIMOTO MASAHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

26 patents
US6878044B2Apr 12, 2005

Polishing apparatus

EBARA CORP47 citations96
US6844274B2Jan 18, 2005

Substrate holder, plating apparatus, and plating method

EBARA CORP39 citations96
US6358128B1Mar 19, 2002

Polishing apparatus

EBARA CORP61 citations96
US6629883B2Oct 7, 2003

Polishing apparatus

EBARA CORP68 citations94
US6293855B1Sep 25, 2001

Polishing apparatus

EBARA CORP27 citations93
US7632378B2Dec 15, 2009

Polishing apparatus

EBARA CORP15 citations92
US7087117B2Aug 8, 2006

Substrate processing apparatus and substrate processing method

EBARA CORP23 citations92
US6682408B2Jan 27, 2004

Polishing apparatus

EBARA CORP21 citations92
US6354922B1Mar 12, 2002

Polishing apparatus

EBARA CORP50 citations92
US7575636B2Aug 18, 2009

Substrate processing apparatus and substrate processing method

EBARA CORP8 citations84
US7442257B2Oct 28, 2008

Substrate processing apparatus and substrate processing method

EBARA CORP9 citations84
US7368016B2May 6, 2008

Substrate processing unit and substrate processing apparatus

EBARA CORP15 citations84
US7063600B2Jun 20, 2006

Polishing apparatus

EBARA CORP10 citations74
US7807027B2Oct 5, 2010

Substrate holder, plating apparatus, and plating method

EBARA CORP6 citations73
US7585205B2Sep 8, 2009

Substrate polishing apparatus and method

EBARA CORP7 citations73
US6929529B2Aug 16, 2005

Polishing apparatus

EBARA CORP4 citations63
US7886685B2Feb 15, 2011

Substrate holding apparatus, substrate holding method, and substrate processing apparatus

EBARA CORP2 citations62
US7341634B2Mar 11, 2008

Apparatus for and method of processing substrate

EBARA CORP4 citations62
US8048282B2Nov 1, 2011

Apparatus and method for plating a substrate

EBARA CORP2 citations58
US7976362B2Jul 12, 2011

Substrate polishing apparatus and method

EBARA CORP1 citations52
US7735450B2Jun 15, 2010

Substrate holding apparatus

EBARA CORP0 citations52
US10141211B2Nov 27, 2018

Substrate processing apparatus and substrate transfer method

EBARA CORP0 citations51
US9786532B2Oct 10, 2017

Substrate processing apparatus and method of transferring a substrate

EBARA CORP0 citations51
US7959977B2Jun 14, 2011

Substrate processing method and apparatus

EBARA CORP0 citations51
US7735451B2Jun 15, 2010

Substrate processing method and apparatus

EBARA CORP0 citations51
US10160013B2Dec 25, 2018

Rinsing bath and substrate cleaning method using such rinsing bath

EBARA CORP0 citations41

FUJI XEROX CO LTD

7 patents

SEKIMOTO MASAHIKO

3 patents

TANAKA ARICHIKA

1 patent

KATSUOKA SEIJI

1 patent

YOSHIOKA JUNICHIRO

1 patent