Inventor
GUO YUGANG
JP12 patents
⚠️ This page may combine multiple inventors who share the name “GUO YUGANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
9 patentsUS6844274B2Jan 18, 2005
Substrate holder, plating apparatus, and plating method
EBARA CORP39 citations96
US7601248B2Oct 13, 2009
Substrate holder and plating apparatus
EBARA CORP11 citations92
US7901551B2Mar 8, 2011
Substrate holder and plating apparatus
EBARA CORP5 citations73
US7807027B2Oct 5, 2010
Substrate holder, plating apparatus, and plating method
EBARA CORP6 citations73
US9624596B2Apr 18, 2017
Electrochemical deposition method
EBARA CORP3 citations72
US9388505B2Jul 12, 2016
Electrochemical deposition method
EBARA CORP1 citations62
US8936705B2Jan 20, 2015
Electrochemical deposition apparatus
EBARA CORP1 citations62
US9593430B2Mar 14, 2017
Electrochemical deposition method
EBARA CORP1 citations51
US9506162B2Nov 29, 2016
Electrochemical deposition method
EBARA CORP0 citations51