Inventor

PAULIAC SEBASTIEN

FR3 patents

Patents

3 patents

US9523910B2Dec 20, 2016

Nanoimprint lithography

PAULIAC SEBASTIEN0 citations42

US9429839B2Aug 30, 2016

Lithography process

PAULIAC SEBASTIEN0 citations25

US9305783B2Apr 5, 2016

Nanometric imprint lithography method

PAULIAC SEBASTIEN0 citations25