Inventor
NISHIMURO TADASHI
JP4 patents
Patents
4 patentsUS6455438B1Sep 24, 2002
Fabrication method for a semiconductor device
OKI ELECTRIC IND CO LTD14 citations80
US4640888AFeb 3, 1987
Alignment mark on a semiconductor and a method of forming the same
OKI ELECTRIC IND CO LTD13 citations72
US4824254AApr 25, 1989
Alignment marks on semiconductor wafers and method of manufacturing the marks
OKI ELECTRIC IND CO LTD14 citations69
US6838643B2Jan 4, 2005
Method and apparatus for performing baking treatment to semiconductor wafer
OKI ELECTRIC IND CO LTD5 citations59